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Electron Beam Power Supplies

Electron Beam Power Supplies

Excelitas is a leader in the design and manufacture of electron beam power supplies for a variety of industrial applications including:

  • Materials processing (adhesives, ink and polymer curing, evaporation, sterilization, machining, pollution abatement)
  • Welding
  • Semiconductor manufacturing equipment (electron beam lithography)

Key Features:

•  Designs up to 200 kV and 20 kW
•  Soft switching resonant topologies for high efficiency, compact size, fast 
   dynamic response, and low stored energy
•  Analog, Digital Serial (e.g. RS-232), or custom I/O interface
•  Emission current control via either filament or grid supplies
•  Low ripple, tight output regulation, and highly accurate repeatability
•  Open and short circuit, arc, overtemperature, and overvoltage protection
•  Universal input and active PFC available
    -  Single phase input up to 6kW
    -  Three phase input from 5kW and higher

Ion Beam Supplies can be designed and created for particular applications by starting with an Electron Beam power supply and adding extractor, suppressor and/or lens supplies, as needed. Applications include:

  • Ion Implantation
  • Photovoltaic manufacturing
  • Ion beam deposition

Quality Certification and Agency Approvals:

  • ISO 9001-certified
  • TÜV, CSA, CE-marking available
  • RoHS-compliance available

In September 2012, Kaiser Systems became part of Excelitas Technologies. Through the acquisition of Kaiser Systems, Excelitas now brings over 30 years of experience in designing and manufacturing electron beam power supplies.