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High Voltage Pulsed Power Supplies

High Voltage Pulsed Power Supplies

Excelitas is a leading designer and manufacturer of high voltage power supplies designed specifically for pulsed systems, such as excimer lasers, where high efficiency, compact size, and fast dynamic response are critical.


•  Semiconductor Manufacturing Equipment
    -  Lithography
    -  Flat panel silicon annealing
•  Pulsed resonant CLC Charging
•  Medical Lasers
    -  Dermatology
    -  Vision correction
    -  Electrophoresis
    -  Bone densitometry
    -  Lithotripsy
    -  Radiation therapy
•  Research Equipment
    -  Particle accelerators
    -  Free electron lasers
•  Marx Generators
    -  Solid state thyratron replacements
    -  Pulse forming networks
    -  Electrostatic Applications
    -  Pollution abatement
    -  Air filtration
•  Dielectric Barrier Discharge Drivers

Key Features:

  • Output voltage up to 50 kV
  • Air, oil and solid encapsulation HV insulation systems
  • Soft switching resonant phase shift topologies for high efficiency, compact size, fast dynamic response, and low stored energy
  • Pulsed resonant charging repeatability: 3 sigma <0.05% deviation
  • Pulsed resonant charging to > 50 kW, 6 kHz and higher PRF
  • Direct charged marx generators with integrated inverter
  • Extensive fault protection and tolerance
  • Air, water, or air/water cooling
  • Analog, RS-232, or custom I/O interface
  • Universal input and PFC available

Quality Certification and Agency Approvals:

  • ISO 9001-certified
  • TÜV, CSA, CE-marking available
  • RoHS-compliance available

In September 2012, Kaiser Systems became part of Excelitas Technologies. Through the acquisition of Kaiser Systems, Excelitas now brings over 30 years of experience in designing and manufacturing high voltage pulsed power supplies.